Lawrie, Kirsten J.
6  Ergebnisse:
Personensuche X
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1

Extreme ultraviolet (EUV) degradation of poly(olefin sulfon..:

Lawrie, Kirsten ; Blakey, Idriss ; Blinco, James...
Radiation Physics and Chemistry.  80 (2011)  2 - p. 236-241 , 2011
 
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2

Polysulfone based non-CA resists for 193nm immersion lithog..:

Chen, Lan ; Goh, Yong-Keng ; Lawrie, Kirsten...
Radiation Physics and Chemistry.  80 (2011)  2 - p. 242-247 , 2011
 
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