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X
Lee, Hongji
111  Ergebnisse:
Personensuche X
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1

A Case of Plasma-Induced Film Breakdown in 3D NAND BEOL Die..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Liang, Ying-Hung ; Chiu, Yuan-Chieh ; Yang, Zusing... - p. 1-4 , 2024
Link: https://doi.org/10.1109/..
 
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2

The Constraint Artificial-Intelligence Assisted Method for ..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Yang, Zusing ; Liang, Ying-Hung ; Tsai, Cheng-En... - p. 1-4 , 2024
Link: https://doi.org/10.1109/..
 
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3

Common Source Line-to-Word Line Short Improvement by Elimin..:

, In: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Chung, Yao-An ; Chu, Yuan-Chieh ; Chang, Chih-Chin... - p. 1-4 , 2023
Link: https://doi.org/10.1109/..
 
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4

Post-Etch Yield Killer Defects in 3D NAND High Aspect Ratio..:

, In: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Chang, Chih-Chin ; Hsiao, Ching-Hung ; Chen, Yi-Che... - p. 1-4 , 2023
Link: https://doi.org/10.1109/..
 
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5

Improvement of Twisting and Line-Edge Roughness of 3D NAND ..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Chung, Yao-An ; Chiu, Yuan-Chieh ; Chang, Yu-Fan... - p. 1-4 , 2022
Link: https://doi.org/10.1109/..
 
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6

Machine learning Assists on High Aspect Ratio Slit Trench E..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Chang, Yu-Fan ; Lee, Hong-Ji ; Chou, Fu-Hsing... - p. 1-4 , 2022
Link: https://doi.org/10.1109/..
 
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7

Study of Plasma Ash Rate Enhancement by Machine Learning Mo..:

, In: 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Jheng, Shao-Lou ; Wu, Jyunhong ; Yang, Zusing... - p. 1-4 , 2021
Link: https://doi.org/10.1109/..
 
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8

Oval-Shaped OP-Layer Hole Etching: Shape Deformation, Local..:

, In: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Yang, Zusing ; Chang, Yao-Yuan ; Wu, Ming-Tsung... - p. 1-4 , 2020
Link: https://doi.org/10.1109/..
 
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9

Optimal Lead Position in Patch-Type Monitoring Sensors for ..:

Lee, Dongseok ; Kwon, Hyunbin ; Lee, Hongji..
Sensors.  20 (2020)  4 - p. 963 , 2020
Link: https://doi.org/10.3390/..
 
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10

Impact of Asymmetric Memory Hole Profile on Silicon Selecti..:

, In: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Chang, Yao-Yuan ; Yang, Zusing ; Wu, Ming-Tsung... - p. 1-4 , 2020
Link: https://doi.org/10.1109/..
 
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11

Reduction of wafer arcing during high aspect ratio etching:

, In: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Yang, Zusing ; Hung, Min-Feng ; Chang, Kuo-Pin... - p. 421-425 , 2017
Link: https://doi.org/10.1109/..
 
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12

Investigations on elimination of plasma-induced Si substrat..:

, In: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Lin, Chih-Yao ; Lo, Chieh ; Chen, Wei-Chen... - p. 431-434 , 2017
Link: https://doi.org/10.1109/..
 
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13

Etch Defect Characterization and Reduction in Hard-Mask-Bas..:

Lee, Hong-Ji ; Hung, Che-Lun ; Leng, Chia-Hao...
International Journal of Plasma Science and Engineering.  2008 (2008)  - p. 1-5 , 2008
Link: https://doi.org/10.1155/..
 
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14

Bimetallic Clusters by Underpotential Deposition on Layered..:

Lee, Joohan ; Hwang, Seongpil ; Lee, Hongji.
The Journal of Physical Chemistry B.  108 (2004)  17 - p. 5372-5379 , 2004
Link: https://doi.org/10.1021/..
 
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15

Photochromism of Novel Spirooxazines II. Polarity Effect on..:

Hu, Andrew Teh ; Lee, Hong-Ji
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals.  298 (1997)  1 - p. 189-195 , 1997
Link: https://doi.org/10.1080/..
 
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