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Springer Handbook of Automation; Springer Handbooks ,
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Semiconductor Manufacturing Automation:
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2021 Winter Simulation Conference (WSC) ,
5
On Scheduling a Photolithograhy Toolset Based on a Deep Rei..:
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Proceedings of the Winter Simulation Conference ,
6
On scheduling a photolithograhy toolset based on a deep rei..:
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2020 IEEE 16th International Conference on Automation Science and Engineering (CASE) ,
8
Modeling, Simulation and Supervisory Control of Semiconduct..:
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International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
11
Optimal scheduling for sequentially connected cluster tools..:
, In:Exemplare: Zentrale;
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Proceedings of the 2016 Winter Simulation Conference ,
14
Modeling and simulation-based analysis of effectiveness of ..:
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International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
15
Scheduling cluster tools for concurrent processing of two w..:
, In:Exemplare: Zentrale;