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Lemettre, Sylvain
26  Ergebnisse:
Personensuche X
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1

Zr-Ti getter film integration in MEMS vacuum packaging:

Lemettre, Sylvain ; Bessouet, Clément ; Aassime, Abdelhanin...
Vacuum.  210 (2023)  - p. 111825 , 2023
Link: https://doi.org/10.1016/..
 
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2

Zr-V getter films for MEMS packaging:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
Lemettre, Sylvain ; Bessouet, Clement ; Kutyla, Charlotte... - p. 1-4 , 2023
Link: https://doi.org/10.1109/..
 
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3

Hydrogen sorption in yttrium-based getter thin films:

Kutyla, Charlotte ; Bessouet, Clément ; Lemettre, Sylvain...
Vacuum.  207 (2023)  - p. 111655 , 2023
Link: https://doi.org/10.1016/..
 
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4

Oxygen and hydrogen sorption in thermally activated yttrium..:

, In: 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP),
Kutyla, Charlotte ; Lemettre, Sylvain ; Bessouet, Clement... - p. 1-4 , 2022
Link: https://doi.org/10.1109/..
 
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5

In-situ electrical characterization of co-evaporated Zr–Ti,..:

Lemettre, Sylvain ; Hammami, Sana ; Bosseboeuf, Alain..
Microsystem Technologies.  25 (2019)  11 - p. 4091-4096 , 2019
Link: https://doi.org/10.1007/..
 
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6

In-Situ Electrical Characterization of Low Temperature Gett..:

Lemettre, Sylvain ; Bessouet, Clément ; Coste, Philippe...
ECS Transactions.  86 (2018)  16 - p. 47-53 , 2018
Link: https://doi.org/10.1149/..
 
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7

Low temperature solid–liquid interdiffusion wafer and die b..:

Lemettre, Sylvain ; Seok, Seonho ; Isac, Nathalie..
Microsystem Technologies.  23 (2016)  9 - p. 3893-3899 , 2016
Link: https://doi.org/10.1007/..
 
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8

Integration of Zr-V getter films in MEMS packaging:

Lemettre, Sylvain ; Bessouet, Clément ; Kutyla, Charlotte...
hal-03836067.  , 2022
Link: https://hal.science/hal-..
 
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9

Oxygen and hydrogen sorption in thermally activated yttrium..:

Kutyla, Charlotte ; Lemettre, Sylvain ; Bessouet, Clement...
info:eu-repo/semantics/altIdentifier/doi/10.1109/DTIP56576.2022.9911710.  , 2022
Link: https://hal.science/hal-..
 
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10

Integration of Zr-V getter films in MEMS packaging:

Lemettre, Sylvain ; Bessouet, Clément ; Kutyla, Charlotte...
hal-03836067.  , 2022
Link: https://hal.science/hal-..
 
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11

Oxygen and hydrogen sorption in thermally activated yttrium..:

Kutyla, Charlotte ; Lemettre, Sylvain ; Bessouet, Clement...
info:eu-repo/semantics/altIdentifier/doi/10.1109/DTIP56576.2022.9911710.  , 2022
Link: https://hal.science/hal-..
 
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12

Oxygen and hydrogen sorption in thermally activated yttrium..:

Kutyla, Charlotte ; Lemettre, Sylvain ; Bessouet, Clement...
info:eu-repo/semantics/altIdentifier/doi/10.1109/DTIP56576.2022.9911710.  , 2022
Link: https://hal.science/hal-..
 
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13

Integration of Zr-V getter films in MEMS packaging:

Lemettre, Sylvain ; Bessouet, Clément ; Kutyla, Charlotte...
hal-03836067.  , 2022
Link: https://hal.science/hal-..
 
?
14

Oxygen and hydrogen sorption in thermally activated yttrium..:

Kutyla, Charlotte ; Lemettre, Sylvain ; Bessouet, Clement...
info:eu-repo/semantics/altIdentifier/doi/10.1109/DTIP56576.2022.9911710.  , 2022
Link: https://hal.science/hal-..
 
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15

Oxygen and hydrogen sorption in thermally activated yttrium..:

Kutyla, Charlotte ; Lemettre, Sylvain ; Bessouet, Clement...
info:eu-repo/semantics/altIdentifier/doi/10.1109/DTIP56576.2022.9911710.  , 2022
Link: https://hal.science/hal-..
 
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