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Lim, Jong Hyeuk
69  Ergebnisse:
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1

Plasma Characteristics of Internal Inductively Coupled Plas..:

Lim, Jong Hyeuk ; Kim, Kyong Nam ; Jeon, Min Hwan..
Plasma Chemistry and Plasma Processing.  31 (2011)  3 - p. 507-515 , 2011
Link: https://doi.org/10.1007/..
 
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2

Characteristics of hydrogenated silicon thin film deposited..:

Kim, In kyo ; Lim, Jong Hyeuk ; Yeom, Geun Young
Vacuum.  86 (2011)  1 - p. 82-86 , 2011
Link: https://doi.org/10.1016/..
 
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3

Investigation of the plasma uniformity in an internal linea..:

Gweon, Gwang Ho ; Lim, Jong Hyeuk ; Kim, Kyong Nam...
Vacuum.  84 (2010)  6 - p. 823-827 , 2010
Link: https://doi.org/10.1016/..
 
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4

Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced ..:

Hong, Seung Pyo ; Lim, Jong Hyeuk ; Gweon, Gwang Ho.
Japanese Journal of Applied Physics.  49 (2010)  8R - p. 080217 , 2010
Link: https://doi.org/10.1143/..
 
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5

Effect of DC Bias Voltage on the Characteristics of Low Tem..:

Gweon, Gwang Ho ; Lim, Jong Hyeuk ; Hong, Seung Pyo.
Japanese Journal of Applied Physics.  49 (2010)  5R - p. 056505 , 2010
Link: https://doi.org/10.1143/..
 
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6

Characteristics of Internal Inductively Coupled Plasma Sour..:

Lim, Jong Hyeuk ; Gweon, Gwang Ho ; Hong, Seung Pyo...
Japanese Journal of Applied Physics.  49 (2010)  3R - p. 030213 , 2010
Link: https://doi.org/10.1143/..
 
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7

Characteristics of internal inductively coupled plasma with..:

Lim, Jong Hyeuk ; Kim, Kyong Nam ; Gwon, Gwang Ho...
Journal of Physics D: Applied Physics.  43 (2010)  9 - p. 095202 , 2010
Link: https://doi.org/10.1088/..
 
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8

Plasma Characteristics of a Ni–Zn Ferrite Enhanced Internal..:

Kim, Kyong Nam ; Lim, Jong Hyeuk ; Yeom, Geun Young
Plasma Chemistry and Plasma Processing.  30 (2009)  1 - p. 183-190 , 2009
Link: https://doi.org/10.1007/..
 
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9

Study of Internal Linear Inductively Coupled Plasma Source ..:

Lim, Jong Hyeuk ; Kim, Kyong Nam ; Gweon, Gwang Ho..
Plasma Chemistry and Plasma Processing.  29 (2009)  4 - p. 251-259 , 2009
Link: https://doi.org/10.1007/..
 
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10

Effect of Antenna Diameter on the Characteristics of Intern..:

Lim, Jong Hyeuk ; Kim, Kyong Nam ; Gweon, Gwang Ho..
Japanese Journal of Applied Physics.  48 (2009)  9 - p. 096002 , 2009
Link: https://doi.org/10.1143/..
 
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11

Plasma Characteristics of Large Area Inductively Coupled Pl..:

Kim, Kyong Nam ; Lim, Jong Hyeuk ; Yeom, Geun Young
Japanese Journal of Applied Physics.  48 (2009)  11 - p. 116006 , 2009
Link: https://doi.org/10.1143/..
 
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12

Line-type inductively coupled plasma source with ferromagne..:

Lim, Jong Hyeuk ; Kim, Kyong Nam ; Gweon, Gwang Ho.
Journal of Physics D: Applied Physics.  42 (2008)  1 - p. 015204 , 2008
Link: https://doi.org/10.1088/..
 
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13

Characteristics of Plasma Using a Ferromagnetic Enhanced In..:

Kim, Kyong Nam ; Lim, Jong Hyeuk ; Park, Jung Kyun..
Japanese Journal of Applied Physics.  47 (2008)  9R - p. 7339 , 2008
Link: https://doi.org/10.1143/..
 
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14

Uniformity of internal linear-type inductively coupled plas..:

Lim, Jong Hyeuk ; Kim, Kyong Nam ; Park, Jung Kyun..
Applied Physics Letters.  92 (2008)  5 - p. , 2008
Link: https://doi.org/10.1063/..
 
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15

Scalable internal linear double comb-type inductively coupl..:

Kim, Kyong Nam ; Lim, Jong Hyeuk ; Park, Jung Kyun.
Surface and Coatings Technology.  202 (2008)  22-23 - p. 5242-5245 , 2008
Link: https://doi.org/10.1016/..
 
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