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X
Lim, Nomin
13  Ergebnisse:
Personensuche X
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1

Comparative study of Cl2 + O2 and HBr + O2 plasma chemistri..:

Lim, Nomin ; Efremov, Alexander ; Kwon, Kwang-Ho
Vacuum.  186 (2021)  - p. 110043 , 2021
Link: https://doi.org/10.1016/..
 
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2

A Comparison of CF4, CHF3 and C4F8 + Ar/O2 Inductively Coup..:

Lim, Nomin ; Efremov, Alexander ; Kwon, Kwang-Ho
Plasma Chemistry and Plasma Processing.  41 (2021)  6 - p. 1671-1689 , 2021
Link: https://doi.org/10.1007/..
 
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3

Dry Etching Performance and Gas-Phase Parameters of C6F12O ..:

Lim, Nomin ; Choi, Yeon Sik ; Efremov, Alexander.
Materials.  14 (2021)  7 - p. 1595 , 2021
Link: https://doi.org/10.3390/..
 
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4

Comparative study of CF4 + O2 and C6F12O + O2 plasmas for r..:

Lim, Nomin ; Efremov, Alexander ; Woo, Byungjun.
Plasma Processes and Polymers.  19 (2021)  2 - p. , 2021
Link: https://doi.org/10.1002/..
 
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5

Etching Kinetics and Surface Conditions for KNbxOy Thin Fil..:

Lim, Nomin ; Efremov, Alexander ; Hwang, Hyun-Gyu..
Plasma Chemistry and Plasma Processing.  40 (2020)  2 - p. 625-640 , 2020
Link: https://doi.org/10.1007/..
 
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6

Study on the surface energy characteristics of polydimethyl..:

Kim, Yong Geun ; Lim, Nomin ; Kim, Jihun...
Applied Surface Science.  477 (2019)  - p. 198-203 , 2019
Link: https://doi.org/10.1016/..
 
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7

Gas-phase chemistry and etching mechanism of SiNx thin film..:

Lim, Nomin ; Efremov, Alexander ; Kwon, Kwang-Ho
Thin Solid Films.  685 (2019)  - p. 97-107 , 2019
Link: https://doi.org/10.1016/..
 
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8

Abnormal characteristics of etched profile on thick dielect..:

Lim, Nomin ; Han, Il Ki ; Kim, Young-Hwan...
Vacuum.  166 (2019)  - p. 45-49 , 2019
Link: https://doi.org/10.1016/..
 
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9

Inductively coupled plasma surface modification of polyethy..:

Lim, Nomin ; Hong, Daewoong ; Kim, Changmok...
Thin Solid Films.  637 (2017)  - p. 27-31 , 2017
Link: https://doi.org/10.1016/..
 
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10

Etching characteristics and mechanisms of Mo thin films in ..:

Lim, Nomin ; Efremov, Alexander ; Yeom, Geun Young..
Japanese Journal of Applied Physics.  53 (2014)  11 - p. 116201 , 2014
Link: https://doi.org/10.7567/..
 
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11

Dry Etching Performance and Gas-Phase Parameters of C(6)F(1..:

Lim, Nomin ; Choi, Yeon Sik ; Efremov, Alexander.
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC8037253/.  , 2021
Link: http://www.ncbi.nlm.nih...
 
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12

Dry Etching Performance and Gas-Phase Parameters of C6F12O ..:

Nomin Lim ; Yeon Sik Choi ; Alexander Efremov.
Manufacturing Processes and Systems.  , 2021
Link: https://doi.org/10.3390/..
 
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13

Dry Etching Performance and Gas-Phase Parameters of C 6 F 1..:

Nomin Lim ; Yeon Sik Choi ; Alexander Efremov.
https://www.mdpi.com/1996-1944/14/7/1595.  , 2021
Link: https://doi.org/10.3390/..
 
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