Liu, Biqiu
36  Ergebnisse:
Personensuche X
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1

Metrology Challenge for Monitoring Post CMP Pattern Through..:

, In: 2023 International Workshop on Advanced Patterning Solutions (IWAPS),
Wang, Gang ; Bian, Yuyang ; Liu, Biqiu.. - p. 1-4 , 2023
 
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2

Investigation of Removing Standing Wave Effect During Litho..:

, In: 2022 China Semiconductor Technology International Conference (CSTIC),
Liu, Xueqiang ; Liu, Biqiu ; Guo, Xiaobo. - p. 1-3 , 2022
 
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3

Litho Process Optimization to Improve Overlay Measurement i..:

, In: 2020 China Semiconductor Technology International Conference (CSTIC),
Wang, Jiantao ; Yu, Jun ; Sun, Yuming... - p. 1-3 , 2020
 
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4

Pattern Roughness Analyses in Advanced Lithography: Power S..:

, In: 2020 International Workshop on Advanced Patterning Solutions (IWAPS),
Bian, Yuyang ; Guan, Xijun ; Liu, Biqiu... - p. 1-4 , 2020
 
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5

Study of Alignment & Overlay Strategy in 14 nm Lithography ..:

, In: 2020 China Semiconductor Technology International Conference (CSTIC),
Lai, Lulu ; Qian, Rui ; Liu, Biqiu... - p. 1-3 , 2020
 
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6

Effects of Electron Beam on Photo Resist Shrinkage and Crit..:

, In: 2020 China Semiconductor Technology International Conference (CSTIC),
Bian, Yuyang ; Sun, Hongxu ; Wang, Lipeng... - p. 1-3 , 2020
 
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10

Remarkable enhancement of the near-infrared upconversion em..:

Liu, Bi-Qiu ; Wang, Jiao ; Zhu, Lin-Lin...
Materials Research Bulletin.  51 (2014)  - p. 180-184 , 2014
 
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13

Synthesis, characterization and luminescent properties of n..:

LIU, Biqiu ; LIU, Lisha ; GUO, Kai...
Journal of Rare Earths.  31 (2013)  8 - p. 745-749 , 2013
 
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