Personensuche
X
?
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
7
Development of Glass-Substrate-Based MEMS Micro-Hotplate wi..:
, In:
?
Springer Series in Geomechanics and Geoengineering; Proceedings of the International Field Exploration and Development Conference 2023 ,
11