E-LIB Suche - Ergebnisse für: Magoshi, Shunko - Sprache DE

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1

Application of Extreme Ultraviolet Lithography to Test Chip..:

Tawarayama, Kazuo ; Nakajima, Yumi ; Kyoh, Suigen...
Japanese Journal of Applied Physics. 50 (2011) 6S - p. 06GB08 , 2011

Link: https://doi.org/10.7567/..

2

Application of Extreme Ultraviolet Lithography to Test Chip..:

Tawarayama, Kazuo ; Nakajima, Yumi ; Kyoh, Suigen...
Japanese Journal of Applied Physics. 50 (2011) 6S - p. 06GB08 , 2011

Link: https://doi.org/10.1143/..

3

Resolution Enhancement for Beyond-22-nm Node Using Extreme ..:

Tawarayama, Kazuo ; Aoyama, Hajime ; Matsunaga, Kentaro...
Japanese Journal of Applied Physics. 49 (2010) 6S - p. 06GD01 , 2010

Link: https://doi.org/10.1143/..

4

Lithographic Performance of Extreme Ultravolet Full-Field E..:

Tawarayama, Kazuo ; Aoyama, Hajime ; Kamo, Takashi...
Japanese Journal of Applied Physics. 48 (2009) 6S - p. 06FA02 , 2009

Link: https://doi.org/10.1143/..

5

Extreme Ultraviolet Lithography Using Small-Field Exposure ..:

Tawarayama, Kazuo ; Magoshi, Shunko ; Tanaka, Yuusuke..
Japanese Journal of Applied Physics. 47 (2008) 6S - p. 4866 , 2008

Link: https://doi.org/10.1143/..

6

Improved Electron-Beam/Deep-Ultraviolet Intralevel Mix-and-..:

Magoshi, Shunko ; Niiyama, Hiromi ; Sato, Shinji...
Japanese Journal of Applied Physics. 38 (1999) 4R - p. 2169 , 1999

Link: https://doi.org/10.1143/..

7

Charge-reducing Effect of Chemically Amplified Resist in El..:

Nakasugi, Tetsuro ; Magoshi, Shunko ; Sugihara, Kazuyoshi..
Japanese Journal of Applied Physics. 37 (1998) 12S - p. 6756 , 1998

Link: https://doi.org/10.1143/..

8

Contamination Charging up Effect in a Variably Shaped Elect..:

Ando, Atsushi ; Sunaoshi, Hitoshi ; Sato, Shinji...
Japanese Journal of Applied Physics. 35 (1996) 12S - p. 6426 , 1996

Link: https://doi.org/10.1143/..

9

Electron Beam Calibration Method for Character ProjectionEx..:

Hitoshi Sunaoshi, Hitoshi Sunaoshi ; Kiyoshi Hattori, Kiyoshi Hattori ; Jun Takamatsu, Jun Takamatsu...
Japanese Journal of Applied Physics. 34 (1995) 12S - p. 6679 , 1995

Link: https://doi.org/10.1143/..

10

Character Projection EB Data Conversion System Combined wit..:

Hara, Shigehiro ; Shunko Magoshi, Shunko Magoshi ; Kiyomi Koyama, Kiyomi Koyama
Japanese Journal of Applied Physics. 33 (1994) 12S - p. 6935 , 1994

Link: https://doi.org/10.1143/..

11

Patterning Accuracy Estimation of Electron Beam Direct-Writ..:

Hattori, Kiyoshi ; Magoshi, Shunko ; Sunaoshi, Hitoshi...
Japanese Journal of Applied Physics. 33 (1994) 12S - p. 6966 , 1994

Link: https://doi.org/10.1143/..

12

High-Speed Electron Beam Data Conversion System Combining H..:

Magoshi, Shunko ; Koyama, Kiyomi ; Ikenaga, Osamu...
Japanese Journal of Applied Physics. 31 (1992) 12S - p. 4257 , 1992

Link: https://doi.org/10.1143/..

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