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Mallikarjunan, Anupama
8  Ergebnisse:
Personensuche X
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1

Mechanistic Understanding of Low κ Organosilicate Glass Fil..:

Mallikarjunan, Anupama ; Achtyl, Jennifer ; Yang, Rung-Je...
ECS Journal of Solid State Science and Technology.  8 (2019)  5 - p. P3185-P3189 , 2019
Link: https://doi.org/10.1149/..
 
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2

In Situ Infrared Absorption Study of Plasma-Enhanced Atomic..:

Peña, Luis Fabián ; Mattson, Eric C. ; Nanayakkara, Charith E....
Langmuir.  34 (2018)  8 - p. 2619-2629 , 2018
Link: https://doi.org/10.1021/..
 
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3

Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitri..:

Faraz, Tahsin ; van Drunen, Maarten ; Knoops, Harm C. M....
ACS Applied Materials & Interfaces.  9 (2017)  2 - p. 1858-1869 , 2017
Link: https://doi.org/10.1021/..
 
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4

Role of Trimethylaluminum in Low Temperature Atomic Layer D..:

Dangerfield, Aaron ; Nanayakkara, Charith E. ; Mallikarjunan, Anupama...
Chemistry of Materials.  29 (2017)  14 - p. 6022-6029 , 2017
Link: https://doi.org/10.1021/..
 
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5

Atomic Layer Deposition of Silicon Dioxide Using Aminosilan..:

Peña, Luis Fabián ; Nanayakkara, Charith E. ; Mallikarjunan, Anupama...
The Journal of Physical Chemistry C.  120 (2016)  20 - p. 10927-10935 , 2016
Link: https://doi.org/10.1021/..
 
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6

Silicon precursor development for advanced dielectric barri..:

Mallikarjunan, Anupama ; Johnson, Andrew D. ; Matz, Laura...
Microelectronic Engineering.  92 (2012)  - p. 83-85 , 2012
Link: https://doi.org/10.1016/..
 
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7

β-phase tungsten nanorod formation by oblique-angle sputter..:

Karabacak, Tansel ; Mallikarjunan, Anupama ; Singh, Jitendra P....
Applied Physics Letters.  83 (2003)  15 - p. 3096-3098 , 2003
Link: https://doi.org/10.1063/..
 
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8

Atomic layer deposition of wet-etch resistant silicon nitri..:

Faraz, T Tahsin ; Drunen, M Maarten van ; Knoops, HCM Harm...
ISSN:1944-8244.  , 2017
Link: http://repository.tue.nl..
 
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