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2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA) ,
3
High Thermally Conductive, High-Speed Deposition of AlN by ..:
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2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) ,
10
Crystalline Gallium Nitride Deposition by RF-Biased Atomic ..:
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2022 IEEE International Interconnect Technology Conference (IITC) ,
11
Low Resistivity Titanium Nitride Thin Film Fabricated by At..:
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2020 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) ,
14