E-LIB Suche - Ergebnisse für: Miyajima, Hideshi

1

Chemical bonding structure in porous SiOC films (k < 2.4) w..:

Miyajima, Hideshi ; Masuda, Hideaki ; Watanabe, Kei...
Micro and Nano Engineering. 3 (2019) - p. 1-6 , 2019

Link: https://doi.org/10.1016/..

2

Erratum to "Chemical bonding structure in porous SiOC films..:

Miyajima, Hideshi ; Masuda, Hideaki ; Watanabe, Kei...
Micro and Nano Engineering. 3 (2019) - p. 92 , 2019

Link: https://doi.org/10.1016/..

3

Review of methods for the mitigation of plasma‐induced dama..:

Miyajima, Hideshi ; Ishikawa, Kenji ; Sekine, Makoto.
Plasma Processes and Polymers. 16 (2019) 9 - p. , 2019

Link: https://doi.org/10.1002/..

4

Adhesion enhancement and amine reduction using film redepos..:

Miyajima, Hideshi ; Watanabe, Kei ; Ishikawa, Kenji..
Japanese Journal of Applied Physics. 58 (2019) 2 - p. 020908 , 2019

Link: https://doi.org/10.7567/..

5

Formation of High Reliability Hydrogen-free MONOS Cells Usi..:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),

Noguchi, Masaki ; Abe, Junko ; Ogawa, Yoshihiro... - p. 30.2.1-30.2.4 , 2019

Link: https://doi.org/10.1109/..

6

Moisture Uptake Impact on Damage Layer of Porous Low-k Film..:

Tagami, Masayoshi ; Ogino, Atsushi ; Miyajima, Hideshi...
ECS Transactions. 41 (2011) 7 - p. 405-413 , 2011

Link: https://doi.org/10.1149/..

7

Effect of Plasma Treatment and Dielectric Diffusion Barrier..:

Usui, Takamasa ; Miyajima, Hideshi ; Masuda, Hideaki...
Japanese Journal of Applied Physics. 45 (2006) 3R - p. 1570 , 2006

Link: https://doi.org/10.1143/..

8

Properties of High-Performance Porous SiOC Low-k Film Fabri..:

Yoda, Takashi ; Fujita, Keiji ; Miyajima, Hideshi...
Japanese Journal of Applied Physics. 44 (2005) 6R - p. 3872 , 2005

Link: https://doi.org/10.1143/..

9

Structural Studies of High-Performance Low-k Dielectric Mat..:

Yoda, Takashi ; Nakasaki, Yasushi ; Hashimoto, Hideki...
Japanese Journal of Applied Physics. 44 (2005) 1R - p. 75 , 2005

Link: https://doi.org/10.1143/..

10

High-Performance SiOF Film Fabricated Using a Dual-Frequenc..:

Yoda, Takashi ; Fujita, Keiji ; Miyajima, Hideshi...
Japanese Journal of Applied Physics. 43 (2004) 9R - p. 5984 , 2004

Link: https://doi.org/10.1143/..

11

Ab initio Molecular Orbital Study of Water Absorption and H..:

Nakasaki, Yasushi ; Miyajima, Hideshi ; Hayasaka, Ryota Katsumata
Japanese Journal of Applied Physics. 36 (1997) 4S - p. 2545 , 1997

Link: https://doi.org/10.1143/..

12

Ab initio Molecular Orbital Study of Water Absorption and H..:

Nakasaki, Yasushi ; Miyajima, Hideshi ; Hayasaka, Ryota Katsumata
Japanese Journal of Applied Physics. 36 (1997) 4S - p. 2533 , 1997

Link: https://doi.org/10.1143/..

13

Ab Initio Molecular Orbital Study of Suppression of Water A..:

Nakasaki, Yasushi ; Miyajima, Hideshi ; Hayasaka, Ryota Katsumata
Japanese Journal of Applied Physics. 36 (1997) 8R - p. 5259 , 1997

Link: https://doi.org/10.1143/..

14

Water Absorption Properties of Fluorine-Doped SiO2 Films Us..:

Miyajima, Hideshi ; Katsumata, Ryota ; Nakasaki, Yasushi.
Japanese Journal of Applied Physics. 35 (1996) 12R - p. 6217 , 1996

Link: https://doi.org/10.1143/..

15

Chemical bonding structure in porous SiOC films (k < 2.4) w..:

Hideshi Miyajima ; Hideaki Masuda ; Kei Watanabe...
http://www.sciencedirect.com/science/article/pii/S2590007219300097. , 2019

Link: https://doi.org/10.1016/..