Miyake, Hideto
325  Ergebnisse:
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13

Polarity control of sputter-deposited AlN with high-tempera..:

Shojiki, Kanako ; Uesugi, Kenjiro ; Xiao, Shiyu.
Materials Science in Semiconductor Processing.  166 (2023)  - p. 107736 , 2023
 
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15

Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN ..:

Nakanishi, Yudai ; Hayashi, Yusuke ; Hamachi, Takeaki...
Journal of Electronic Materials.  52 (2023)  8 - p. 5099-5108 , 2023
 
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