Natsuaki, Nobuyoshi
27  Ergebnisse:
Personensuche X
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2

Inactivation of Low‐Dose Implanted Phosphorus Pileup in the..:

Sato, Hisako ; Yanagisawa, Yasunobu ; Ogasawara, Makoto...
Journal of The Electrochemical Society.  146 (1999)  1 - p. 367-371 , 1999
 
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3

ULSI-process demands of contamination control on ion implan..:

Natsuaki, Nobuyoshi ; Kamata, Tadashi ; Kondo, Kaori.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  96 (1995)  1-2 - p. 62-67 , 1995
 
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5

Amorphization Processes in Ion Implanted Si: Temperature De..:

Motooka, Teruaki ; Kobayashi, Fumihiko ; Fons, Paul...
Japanese Journal of Applied Physics.  30 (1991)  12S - p. 3617 , 1991
 
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7

Highly Reliable Thin Silicon Dioxide Layers Grown on Heavil..:

Ohyu, Kiyonori ; Wade, Yasuo ; Iijima, Shinpei.
Journal of The Electrochemical Society.  137 (1990)  7 - p. 2261-2265 , 1990
 
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14

Secondary Defects in 2 MeV Phosphorus Implanted Silicon:

Tamura, Masao ; Natsuaki, Nobuyoshi
Japanese Journal of Applied Physics.  25 (1986)  6A - p. L474 , 1986
 
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