E-LIB Suche - Ergebnisse für: Omura, Mitsuhiro

1

Progress and perspectives in dry processes for nanoscale fe..:

Iwase, Taku ; Kamaji, Yoshito ; Kang, Song Yun...
Japanese Journal of Applied Physics. 58 (2019) SE - p. SE0802 , 2019

Link: https://doi.org/10.7567/..

2

Progress and perspectives in dry processes for emerging mul..:

Iwase, Taku ; Kamaji, Yoshito ; Kang, Song Yun...
Japanese Journal of Applied Physics. 58 (2019) SE - p. SE0803 , 2019

Link: https://doi.org/10.7567/..

3

Formation mechanism of sidewall striation in high-aspect-ra..:

Omura, Mitsuhiro ; Hashimoto, Junichi ; Adachi, Takahiro...
Japanese Journal of Applied Physics. 58 (2019) SE - p. SEEB02 , 2019

Link: https://doi.org/10.7567/..

4

Progress and perspectives in dry processes for leading-edge..:

Iwase, Taku ; Kamaji, Yoshito ; Kang, Song Yun...
Japanese Journal of Applied Physics. 58 (2019) SE - p. SE0804 , 2019

Link: https://doi.org/10.7567/..

5

Highly selective etching of LaAlSiOxto Si using C4F8/Ar/H2p..:

Sasaki, Toshiyuki ; Matsuda, Kazuhisa ; Omura, Mitsuhiro..
Japanese Journal of Applied Physics. 54 (2015) 6S2 - p. 06GB03 , 2015

Link: https://doi.org/10.7567/..

6

The Photopolymer Science and Technology Award:

Kato, Hirokazu ; Seino, Yuriko ; Yonemitsu, Hiroki...
Journal of Photopolymer Science and Technology. 27 (2014) 1 - p. 7-10 , 2014

Link: https://doi.org/10.2494/..

7

Selective etch of poly(methyl methacrylate) in block copoly..:

Yamamoto, Hiroshi ; Imamura, Tsubasa ; Omura, Mitsuhiro..
Japanese Journal of Applied Physics. 53 (2014) 3S2 - p. 03DD03 , 2014

Link: https://doi.org/10.7567/..

8

Electrical Via Chain Yield for DSA Contact Hole Shrink Proc..:

Kato, Hirokazu ; Seino, Yuriko ; Yonemitsu, Hiroki...
Journal of Photopolymer Science and Technology. 26 (2013) 1 - p. 21-26 , 2013

Link: https://doi.org/10.2494/..

9

Sub-30nm via interconnects fabricated using directed self-a..:

Kato, Hirokazu ; Seino, Yuriko ; Yonemitsu, Hiroki...
Microelectronic Engineering. 110 (2013) - p. 152-155 , 2013

Link: https://doi.org/10.1016/..

10

EUVL Challenges towards 1x nm Generation:

Kyoh, Suigen ; Nakajima, Yumi ; Watanabe, Shinya...
Journal of Photopolymer Science and Technology. 24 (2011) 1 - p. 19-23 , 2011

Link: https://doi.org/10.2494/..

11

CASE OF INFLAMMATORY FIBROID POLYP OF THE ESOPHAGOGASTRIC J..:

Yamane, Tateki ; Uchiyama, Kan ; Ishii, Takayuki...
Digestive Endoscopy. 21 (2009) 2 - p. 97-100 , 2009

Link: https://doi.org/10.1111/..

12

REFRACTORY DIVERTICULAR COLITIS WITH PROGRESSIVE ULCERATIVE..:

Yamane, Tateki ; Uchiyama, Kan ; Ishii, Takayuki...
Digestive Endoscopy. 21 (2009) 3 - p. 188-191 , 2009

Link: https://doi.org/10.1111/..

13

REFRACTORY GASTRIC ANTRAL ULCER OF UNKNOWN ETIOLOGY:

Yamane, Tateki ; Uchiyama, Kan ; Ishii, Takayuki...
Digestive Endoscopy. 20 (2008) 4 - p. 203-206 , 2008

Link: https://doi.org/10.1111/..

14

Two Cases of Refractory Post-Bulbar Duodenal Ulcer:

Yamane, Tateki ; Uchiyama, Kan ; Ishii, Takayuki...
Internal Medicine. 46 (2007) 17 - p. 1413-1418 , 2007

Link: https://doi.org/10.2169/..

15

MULTIPLE INFLAMMATORY MYOGLANDULAR POLYPS OF THE COLON:

Yamane, Tateki ; Uchiyama, Kan ; Hata, Daigo...
Digestive Endoscopy. 19 (2007) 4 - p. 192-194 , 2007

Link: https://doi.org/10.1111/..