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2016 16th International Workshop on Junction Technology (IWJT) ,
5
10 nm-deep n+/p and p+/n Ge junctions with high activation ..:
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2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) ,
12
Optimization of implant and anneal processes:
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2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology ,
13
Cluster Carbon ion implantation for NMOS device fabrication..:
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2010 International Workshop on Junction Technology Extended Abstracts ,
14