Pérennès, F.
567  Ergebnisse:
Personensuche X
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2

Compact micropumping system based on LIGA fabricated microp..:

Matteucci, M. ; Pérennès, F. ; Marmiroli, B....
Microelectronic Engineering.  83 (2006)  4-9 - p. 1288-1290 , 2006
 
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3

Sharp beveled tip hollow microneedle arrays fabricated by L..:

Pérennès, F ; Marmiroli, B ; Matteucci, M...
Journal of Micromechanics and Microengineering.  16 (2006)  3 - p. 473-479 , 2006
 
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6

X-ray lithography for micro- and nano-fabrication at ELETTR..:

Fabrizio, E Di ; Fillipo, R ; Cabrini, S...
Journal of Physics: Condensed Matter.  16 (2004)  33 - p. S3517-S3535 , 2004
 
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8

Characterisation of adaptive optic pyramid wavefront sensor..:

Pérennès, F. ; Ghigo, M. ; Cabrini, S.
Microelectronic Engineering.  67-68 (2003)  - p. 566-573 , 2003
 
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9

Adhesion improvement in the deep X-ray lithography process ..:

Pérennès, F. ; Pantenburg, F.J.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  174 (2001)  3 - p. 317-323 , 2001
 
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10

Deep X-ray lithography beamline at ELETTRA:

Pérennès, F. ; De Bona, F. ; Pantenburg, F.J.
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  467-468 (2001)  - p. 1274-1278 , 2001
 
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11

Heat load problems in deep X-ray lithography:

Cudin, I. ; De Bona, F. ; Gambitta, A...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  467-468 (2001)  - p. 1265-1268 , 2001
 
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