Pereira, Silvania F.
174  Ergebnisse:
Personensuche X
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1

Optical and tactile measurements on SiC sample defects:

Grundmann, Jana ; Bodermann, Bernd ; Ermilova, Elena...
Journal of Sensors and Sensor Systems.  13 (2024)  1 - p. 109-121 , 2024
 
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3

Investigation of coherent Fourier scatterometry as a calibr..:

Paul, Anubhav ; Rafighdoost, Jila ; Dou, Xiujie.
Measurement Science and Technology.  35 (2024)  7 - p. 075202 , 2024
 
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4

Coherent Fourier Scatterometry for Detection of Killer Defe..:

Rafighdoost, Jila ; Kolenov, Dmytro ; Pereira, Silvania F.
IEEE Transactions on Semiconductor Manufacturing.  37 (2024)  1 - p. 124-128 , 2024
 
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10

Determination of steep sidewall angle using polarization-se..:

Dou, Xiujie ; Pereira, Silvania F ; Min, Changjun...
Measurement Science and Technology.  32 (2021)  8 - p. 085201 , 2021
 
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13

Far-field sectioning for the retrieval of subwavelength gra..:

Siaudinyte, Lauryna ; Pereira, Silvania F
Measurement Science and Technology.  31 (2020)  10 - p. 104005 , 2020
 
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