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X
Pivovarenok, S. A.
26  Ergebnisse:
Personensuche X
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1

Influence of Mixture Composition on Electrophysical Paramet..:

Pivovarenok, S. A. ; Murin, D. B. ; Grazhdyan, A. Yu.
High Energy Chemistry.  57 (2023)  2 - p. 163-167 , 2023
Link: https://doi.org/10.1134/..
 
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2

Influence of Mixture Composition on Electrophysical Paramet..:

Pivovarenok, S. A. ; Murin, D. B. ; Grazhdyan, A. Yu.
High Energy Chemistry.  57 (2023)  2 - p. 151-155 , 2023
Link: https://doi.org/10.1134/..
 
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3

Spectral Control of the Process of Copper Etching in Radio ..:

Murin, D. B. ; Pivovarenok, S. A. ; Dunaev, A. V...
Russian Microelectronics.  51 (2022)  6 - p. 359-367 , 2022
Link: https://doi.org/10.1134/..
 
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4

Kinetics of Silicon Etching in Trifluoromethane Plasma:

Pivovarenok, S. A. ; Murin, D. B.
High Energy Chemistry.  56 (2022)  3 - p. 197-200 , 2022
Link: https://doi.org/10.1134/..
 
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5

The Importance of Taking into Account the Heterogeneous Rec..:

Sitanov, D. V. ; Pivovarenok, S. A. ; Murin, D. B.
High Temperature.  60 (2022)  S2 - p. S146-S152 , 2022
Link: https://doi.org/10.1134/..
 
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6

Electrophysical Characteristics and Emission Spectra of Car..:

Murin, D. B. ; Pivovarenok, S. A. ; Chesnokov, I. A..
Russian Microelectronics.  51 (2022)  6 - p. 368-375 , 2022
Link: https://doi.org/10.1134/..
 
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7

Plasma-Chemical and Reactive-Ion Etching of Silicon in Tetr..:

Murin, D. B. ; Pivovarenok, S. A. ; Kozin, A. S.
Russian Microelectronics.  51 (2022)  4 - p. 243-246 , 2022
Link: https://doi.org/10.1134/..
 
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8

Electrophysical Parameters and Emission Spectra of a DC Glo..:

Murin, D. B. ; Pivovarenok, S. A. ; Malyugin, A. A..
Russian Microelectronics.  51 (2022)  3 - p. 164-169 , 2022
Link: https://doi.org/10.1134/..
 
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9

Effect of a Mixture's Composition on the Electrophysical Pa..:

Pivovarenok, S. A. ; Murin, D. B. ; Sitanov, D. V.
Russian Microelectronics.  50 (2021)  1 - p. 39-44 , 2021
Link: https://doi.org/10.1134/..
 
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10

Effect of Mixture Composition on Electrophysical Parameters..:

Pivovarenok, S. A. ; Bakshina, P. I.
High Energy Chemistry.  55 (2021)  3 - p. 233-237 , 2021
Link: https://doi.org/10.1134/..
 
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11

Electrophysical Characteristics of Atmospheric Pressure Dis..:

Pivovarenok, S. A.
High Energy Chemistry.  53 (2019)  5 - p. 376-379 , 2019
Link: https://doi.org/10.1134/..
 
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12

The Effect of an N2 Additive on the GaAs Etching Rate in CF..:

Pivovarenok, S. A.
Russian Microelectronics.  48 (2019)  4 - p. 236-239 , 2019
Link: https://doi.org/10.1134/..
 
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13

Visualization of Defects on the Semiconductor Surface Using..:

Sitanov, D. V. ; Pivovarenok, S. A.
Russian Microelectronics.  47 (2018)  1 - p. 34-39 , 2018
Link: https://doi.org/10.1134/..
 
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14

Kinetics of Atomic Recombination on Silicon Samples in Chlo..:

Sitanov, D. V. ; Pivovarenok, S. A.
Plasma Physics Reports.  44 (2018)  8 - p. 713-722 , 2018
Link: https://doi.org/10.1134/..
 
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15

The Effect of the Mixture Composition on the Electrophysica..:

Pivovarenok, S. A.
Russian Microelectronics.  47 (2018)  4 - p. 247-250 , 2018
Link: https://doi.org/10.1134/..
 
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