Provine, J
523  Ergebnisse:
Personensuche X
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2

ALD HfO2 Films for Defining Microelectrodes for Electrochem..:

Chia, Charmaine ; Shulaker, Max M. ; Provine, J..
ACS Applied Materials & Interfaces.  11 (2019)  29 - p. 26082-26092 , 2019
 
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3

Electrical Properties of Ultrathin Platinum Films by Plasma..:

Kim, Hyo Jin K. ; Kaplan, Kirsten E. ; Schindler, Peter...
ACS Applied Materials & Interfaces.  11 (2019)  9 - p. 9594-9599 , 2019
 
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4

Boosting Qs of AlN Resonators by Redefining Acoustic Bounda..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Gao, Anming ; Winterkorn, Martin ; Yang, Yansong... - p. 883-886 , 2019
 
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5

Superconducting niobium titanium nitride thin films deposit..:

Yemane, Y T ; Sowa, M J ; Zhang, J...
Superconductor Science and Technology.  30 (2017)  9 - p. 095010 , 2017
 
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6

Measurement of Young's modulus and residual stress of atomi..:

Purkl, Fabian ; Daus, Alwin ; English, Timothy S...
Journal of Micromechanics and Microengineering.  27 (2017)  8 - p. 085008 , 2017
 
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9

Atomically Flat Silicon Oxide Monolayer Generated by Remote..:

Thian, Dickson ; Yemane, Yonas T. ; Logar, Manca...
The Journal of Physical Chemistry C.  120 (2016)  15 - p. 8148-8156 , 2016
 
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10

Atomic layer deposition by reaction of molecular oxygen wit..:

Provine, J ; Schindler, Peter ; Torgersen, Jan...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films.  34 (2016)  1 - p. 01A138 , 2016
 
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12

Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composit..:

Kim, Yongmin ; Provine, J. ; Walch, Stephen P....
ACS Applied Materials & Interfaces.  8 (2016)  27 - p. 17599-17605 , 2016
 
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