E-LIB Suche - Ergebnisse für: Seong, Inho

1

Initiation mechanism of arcing generated in RF capacitively..:

Cho, Chulhee ; Kim, Sijun ; Choi, Minsu...
Physica Scripta. 99 (2024) 5 - p. 055603 , 2024

Link: https://doi.org/10.1088/..

2

Enhancement of Ar Ion Flux on the Substrate by Heterogeneou..:

Seong, Inho ; Kim, Sijun ; Choi, Minsu...
Materials. 16 (2023) 17 - p. 5746 , 2023

Link: https://doi.org/10.3390/..

3

Characterization of SiO2 Plasma Etching with Perfluorocarbo..:

Choi, Minsu ; Lee, Youngseok ; You, Yebin...
Materials. 16 (2023) 16 - p. 5624 , 2023

Link: https://doi.org/10.3390/..

4

Determination of Plasma Potential Using an Emissive Probe w..:

Cho, Chulhee ; Kim, Sijun ; Lee, Youngseok...
Materials. 16 (2023) 7 - p. 2762 , 2023

Link: https://doi.org/10.3390/..

5

Contribution of Ion Energy and Flux on High-Aspect Ratio Si..:

Jeong, Wonnyoung ; Kim, Sijun ; Lee, Youngseok...
Materials. 16 (2023) 10 - p. 3820 , 2023

Link: https://doi.org/10.3390/..

6

On the Quenching of Electron Temperature in Inductively Cou..:

Seong, Inho ; Kim, Si-jun ; Lee, Youngseok...
Materials. 16 (2023) 8 - p. 3219 , 2023

Link: https://doi.org/10.3390/..

7

Computational Analysis on Self-Resonance Frequency of Solen..:

Choi, Min-Su ; Kim, Si-Jun ; Lee, Young-Seok...
Applied Science and Convergence Technology. 32 (2023) 2 - p. 54-57 , 2023

Link: https://doi.org/10.5757/..

8

Computational Study on the Parallel Double-Curling Probe fo..:

Kim, Si-Jun ; Jeong, Won-Nyoung ; Lee, Young-Seok...
Applied Science and Convergence Technology. 32 (2023) 5 - p. 127-133 , 2023

Link: https://doi.org/10.5757/..

9

Development of the Tele-Measurement of Plasma Uniformity vi..:

Kim, Si-Jun ; Choi, Min-Su ; Lee, Sang-Ho...
Sensors. 23 (2023) 5 - p. 2521 , 2023

Link: https://doi.org/10.3390/..

10

Low-Temperature Plasma Diagnostics to Investigate the Proce..:

Lee, Youngseok ; Kim, Sijun ; Lee, Jangjae...
Sensors. 22 (2022) 16 - p. 6029 , 2022

Link: https://doi.org/10.3390/..

11

Investigation into SiO2 Etching Characteristics Using Fluor..:

Jeong, Won-nyoung ; Lee, Young-seok ; Cho, Chul-hee..
Nanomaterials. 12 (2022) 24 - p. 4457 , 2022

Link: https://doi.org/10.3390/..

12

Characterization of an Etch Profile at a Wafer Edge in Capa..:

Seong, Inho ; Lee, Jinho ; Kim, Sijun...
Nanomaterials. 12 (2022) 22 - p. 3963 , 2022

Link: https://doi.org/10.3390/..

13

Observation of prior light emission before arcing developme..:

Kim, Si-jun ; Lee, Young-seok ; Cho, Chul-hee...
Scientific Reports. 12 (2022) 1 - p. , 2022

Link: https://doi.org/10.1038/..

14

Safety of Chamber Exterior Wall Ground:

You, Ye-Bin ; Kim, Si-Jun ; Lee, Young-Seok...
Applied Science and Convergence Technology. 31 (2022) 5 - p. 103-106 , 2022

Link: https://doi.org/10.5757/..

15

Development of a Noninvasive Real-Time Ion Energy Distribut..:

Seong, Inho ; Kim, Sijun ; Lee, Youngseok...
Sensors. 22 (2022) 16 - p. 6254 , 2022

Link: https://doi.org/10.3390/..