Shiba, Sabera Fahmida
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Development of Programmable UV-LED Microlithography System ..:

Shiba, Sabera Fahmida ; Jeon, Hyeongmin ; Kim, Jong-Soo..
Journal of Microelectromechanical Systems.  31 (2022)  1 - p. 97-105 , 2022
 
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UV-LED Lithography System and Characterization:

, In: 2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS),
 
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