E-LIB Suche - Ergebnisse für: Shinoda, Kazunori

1

Isotropic atomic layer etchings of various materials by usi..:

Ohtake, Hiroto ; Miyoshi, Nobuya ; Shinoda, Kazunori..
Japanese Journal of Applied Physics. 62 (2023) SG - p. SG0801 , 2023

Link: https://doi.org/10.35848..

2

Thermal-cyclic atomic layer etching of cobalt with smooth e..:

Fujisaki, Sumiko ; Yamaguchi, Yoshihide ; Kobayashi, Hiroyuki...
Applied Physics Letters. 121 (2022) 12 - p. , 2022

Link: https://doi.org/10.1063/..

3

Dry etching of ternary metal carbide TiAlC via surface modi..:

Nguyen, Thi-Thuy-Nga ; Shinoda, Kazunori ; Hamamura, Hirotaka...
Scientific Reports. 12 (2022) 1 - p. , 2022

Link: https://doi.org/10.1038/..

4

Progress and perspectives in dry processes for nanoscale fe..:

Iwase, Taku ; Kamaji, Yoshito ; Kang, Song Yun...
Japanese Journal of Applied Physics. 58 (2019) SE - p. SE0802 , 2019

Link: https://doi.org/10.7567/..

5

Rapid thermal-cyclic atomic-layer etching of titanium nitri..:

Shinoda, Kazunori ; Miyoshi, Nobuya ; Kobayashi, Hiroyuki...
Journal of Physics D: Applied Physics. 52 (2019) 47 - p. 475106 , 2019

Link: https://doi.org/10.1088/..

6

Progress and perspectives in dry processes for emerging mul..:

Iwase, Taku ; Kamaji, Yoshito ; Kang, Song Yun...
Japanese Journal of Applied Physics. 58 (2019) SE - p. SE0803 , 2019

Link: https://doi.org/10.7567/..

7

Progress and perspectives in dry processes for leading-edge..:

Iwase, Taku ; Kamaji, Yoshito ; Kang, Song Yun...
Japanese Journal of Applied Physics. 58 (2019) SE - p. SE0804 , 2019

Link: https://doi.org/10.7567/..

8

(Invited) Thermal Cyclic Atomic-Level Etching of Nitride Fi..:

Shinoda, Kazunori ; Miyoshi, Nobuya ; Kobayashi, Hiroyuki...
ECS Transactions. 80 (2017) 3 - p. 3-14 , 2017

Link: https://doi.org/10.1149/..

9

Atomic layer etching of silicon nitride using infrared anne..:

Miyoshi, Nobuya ; Kobayashi, Hiroyuki ; Shinoda, Kazunori...
Japanese Journal of Applied Physics. 56 (2017) 6S2 - p. 06HB01 , 2017

Link: https://doi.org/10.7567/..

10

Thermal cyclic etching of silicon nitride using formation a..:

Shinoda, Kazunori ; Izawa, Masaru ; Kanekiyo, Tadamitsu..
Applied Physics Express. 9 (2016) 10 - p. 106201 , 2016

Link: https://doi.org/10.7567/..

11

Monolithically Lens-Integrated Photonic Device Arrays for C..:

Shinoda, Kazunori ; Adachi, Koichiro ; Lee, Yong...
Japanese Journal of Applied Physics. 52 (2013) 2R - p. 022701 , 2013

Link: https://doi.org/10.7567/..

12

Wide-Tuning-Wavelength-Range LGLC Laser with Low-Loss Dual-..:

SUZUKI, Takanori ; ARIMOTO, Hideo ; KITATANI, Takeshi...
IEICE Transactions on Electronics. E95.C (2012) 7 - p. 1272-1275 , 2012

Link: https://doi.org/10.1587/..

13

100-Gbps CMOS transceiver for multilane optical backplane s..:

Takemoto, Takashi ; Yuki, Fumio ; Yamashita, Hiroki...
Optics Express. 19 (2011) 26 - p. B777 , 2011

Link: https://doi.org/10.1364/..

14

A 35-GHz, 0.8-A/W and 26-.MU.m Misalignment Tolerance Micro..:

LEE, Yong ; NAGATSUMA, Kazuyuki ; HOSOMI, Kazuhiko...
IEICE Transactions on Electronics. E94-C (2011) 1 - p. 116-119 , 2011

Link: https://doi.org/10.1587/..

15

High-Speed EA-DFB Laser for 40-G and 100-Gbps:

MAKINO, Shigeki ; SHINODA, Kazunori ; KITATANI, Takeshi...
IEICE Transactions on Electronics. E92-C (2009) 7 - p. 937-941 , 2009

Link: https://doi.org/10.1587/..