Sippola, Perttu
26  Ergebnisse:
Personensuche X
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2

Low-temperature atomic layer deposition of SiO₂/Al₂O₃ multi..:

Putkonen, Matti ; Sippola, Perttu ; Svärd, Laura...
Philosophical Transactions: Mathematical, Physical and Engineering Sciences.  376 (2018)  2112 - p. 1-12 , 2018
 
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3

Influence of plasma parameters on the properties of ultrath..:

Zhu, Zhen ; Sippola, Perttu ; Lipsanen, Harri..
Japanese Journal of Applied Physics.  57 (2018)  12 - p. 125502 , 2018
 
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8

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of ..:

Zhu, Zhen ; Sippola, Perttu ; Ylivaara, Oili...
Zhu , Z , Sippola , P , Ylivaara , O , Modanese , C , Di Sabatino , M , Mizohata , K , Merdes , S , Lipsanen , H & Savin , H 2019 , ' Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide ' , Nanoscale Research Letters , vol. 14 , 55 . https://doi.org/10.1186/s11671-019-2889-y.  , 2019
 
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14

Low-temperature atomic layer deposition of SiO2/Al2O3 multi..:

Putkonen, Matti ; Sippola, Perttu ; Svärd, Laura...
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A: MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES.  , 2018
 
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