St-Gelais, Myriam
149  Ergebnisse:
Personensuche X
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5

Remote Actuation of Silicon Nitride Nanomechanical Resonato..:

Mu, Gengyang ; Snell, Nikaya ; Zhang, Chang...
Journal of Microelectromechanical Systems.  32 (2023)  1 - p. 29-36 , 2023
 
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6

Laser machining of free-standing silicon nitride membranes:

Xie, Xitong ; Nikbakht, Roghayeh ; Couillard, Martin..
Journal of Materials Processing Technology.  318 (2023)  - p. 118001 , 2023
 
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14

Characterization of Mass-Loaded Silicon Nitride On-Chip Res..:

, In: 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Hodges, Timothy ; Wu, Lixue ; Mu, Gengyang... - p. 1-4 , 2022
 
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