Taisei Motomura
30  Ergebnisse:
Personensuche X
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7

Effect of RF power on AlN film crystallinity in low pressur..:

Kawato, Yuto ; Motomura, Taisei ; Tabaru, Tatsuo..
Japanese Journal of Applied Physics.  61 (2022)  4 - p. 046001 , 2022
 
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10

Potential of High-density Convergent Plasma Sputtering Devi..:

Motomura, Taisei ; Tabaru, Tatsuo
e-Journal of Surface Science and Nanotechnology.  17 (2019)  0 - p. 27-31 , 2019
 
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11

Investigation of the relationship between plasma etching ch..:

Kasashima, Yuji ; Tabaru, Tatsuo ; Matsuda, Osamu.
Japanese Journal of Applied Physics.  58 (2019)  4 - p. 041001 , 2019
 
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12

Transport of a helicon plasma by a convergent magnetic fiel..:

Takahashi, Kazunori ; Motomura, Taisei ; Ando, Akira...
Journal of Physics D: Applied Physics.  47 (2014)  42 - p. 425201 , 2014
 
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13

Numerous flaked particles instantaneously generated by micr..:

Kasashima, Yuji ; Motomura, Taisei ; Nabeoka, Natsuko.
Japanese Journal of Applied Physics.  54 (2014)  1S - p. 01AE02 , 2014
 
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15

Real-time characteristic impedance monitoring for end-point..:

Motomura, Taisei ; Kasashima, Yuji ; Uesugi, Fumihiko..
Japanese Journal of Applied Physics.  53 (2014)  3S2 - p. 03DC03 , 2014
 
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