Personensuche
X
?
2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
8
Line Edge Roughness Reduction in High Aspect Ratio Carbon H..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
9
Deep trench (DT) etching process for power MOS device:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
10
Trimming of Silicon Nitride Hard Mask Using Cyclic Depositi..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
11
Redistribution Layer aluminum advanced etching process deve..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
12
Carbon Hard Mask Opening Process Development with Novel Sid..:
, In:
?
2022 China Semiconductor Technology International Conference (CSTIC) ,
13
Bitline etch process development for Advanced process DRAM ..:
, In:
?
2022 China Semiconductor Technology International Conference (CSTIC) ,
14