Van Look, Lieve
8  Ergebnisse:
Personensuche X
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1

Mask innovations on the eve of high NA EUV lithography:

Philipsen, Vicky ; Frommhold, Andreas ; Thakare, Devesh...
Japanese Journal of Applied Physics.  63 (2024)  4 - p. 040804 , 2024
 
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3

High Throughput Grating Qualification for Rating Directed S..:

Gronheid, Roel ; Van Look, Lieve ; Delgadillo, Paulina Rincon...
Journal of Photopolymer Science and Technology.  26 (2013)  2 - p. 147-152 , 2013
 
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4

Readying Directed Self-Assembly for Patterning in Semi-Cond..:

Gronheid, Roel ; Delgadillo, Paulina Rincon ; Singh, Arjun...
Journal of Photopolymer Science and Technology.  26 (2013)  6 - p. 779-791 , 2013
 
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5

"Mask Enhancer" Technology on ArF Immersion Tool for 45-nm-..:

Yuito, Takashi ; Wiaux, Vincent ; Look, Lieve Van...
Japanese Journal of Applied Physics.  45 (2006)  6S - p. 5396 , 2006
 
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