Wachter, Georg
292  Ergebnisse:
Personensuche X
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2

Modeling and analysis of sulfur hexafluoride plasma etching..:

Aguinsky, Luiz Felipe ; Wachter, Georg ; Manstetten, Paul...
Journal of Micromechanics and Microengineering.  31 (2021)  12 - p. 125003 , 2021
 
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3

Feature-Scale Modeling of Low-Bias SF6 Plasma Etching of Si:

, In: 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS),
 
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7

Attosecond physics phenomena at nanometric tips:

Krüger, Michael ; Lemell, Christoph ; Wachter, Georg..
Journal of Physics B: Atomic, Molecular and Optical Physics.  51 (2018)  17 - p. 172001 , 2018
 
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