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Waechtler, Thomas
32  Ergebnisse:
Personensuche X
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1

Half-sandwich cobalt complexes in the metal-organic chemica..:

Georgi, Colin ; Hapke, Marko ; Thiel, Indre...
Thin Solid Films.  578 (2015)  - p. 180-184 , 2015
Link: https://doi.org/10.1016/..
 
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2

[Ag{S2CNR(C2H4OH)}] as Single‐Source Precursor for Ag2S – S..:

Mothes, Robert ; Jakob, Alexander ; Waechtler, Thomas...
European Journal of Inorganic Chemistry.  2015 (2015)  10 - p. 1726-1733 , 2015
Link: https://doi.org/10.1002/..
 
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3

Carbon nanotube based via interconnects: Performance estima..:

Fiedler, Holger ; Toader, Marius ; Hermann, Sascha...
Microelectronic Engineering.  120 (2014)  - p. 210-215 , 2014
Link: https://doi.org/10.1016/..
 
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4

Copper oxide atomic layer deposition on thermally pretreate..:

Melzer, Marcel ; Waechtler, Thomas ; Müller, Steve...
Microelectronic Engineering.  107 (2013)  - p. 223-228 , 2013
Link: https://doi.org/10.1016/..
 
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5

Magneto-optical Kerr effect studies of Cu2O/nickel heterost..:

Salvan, Georgeta ; Robaschik, Peter ; Fronk, Michael...
Microelectronic Engineering.  107 (2013)  - p. 130-133 , 2013
Link: https://doi.org/10.1016/..
 
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6

Enhancement of the thermoelectric properties of PEDOT:PSS t..:

Luo, Jinji ; Billep, Detlef ; Waechtler, Thomas...
Journal of Materials Chemistry A.  1 (2013)  26 - p. 7576 , 2013
Link: https://doi.org/10.1039/..
 
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7

Ruthenocenes and Half‐Open Ruthenocenes: Synthesis, Charact..:

Tuchscherer, André ; Georgi, Colin ; Roth, Nina...
European Journal of Inorganic Chemistry.  2012 (2012)  30 - p. 4867-4876 , 2012
Link: https://doi.org/10.1002/..
 
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8

Magneto-optical Kerr-effect studies on copper oxide thin fi..:

Fronk, Michael ; Müller, Steve ; Waechtler, Thomas...
Thin Solid Films.  520 (2012)  14 - p. 4741-4744 , 2012
Link: https://doi.org/10.1016/..
 
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9

Distinguishing between Individual Contributions to the Via ..:

Fiedler, Holger ; Toader, Marius ; Hermann, Sascha...
ECS Journal of Solid State Science and Technology.  1 (2012)  6 - p. M47-M51 , 2012
Link: https://doi.org/10.1149/..
 
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10

ALD-grown seed layers for electrochemical copper deposition..:

Waechtler, Thomas ; Ding, Shao-Feng ; Hofmann, Lutz...
Microelectronic Engineering.  88 (2011)  5 - p. 684-689 , 2011
Link: https://doi.org/10.1016/..
 
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11

Copper Oxide ALD from a Cu(I) <beta>-Diketonate: Detailed G..:

Waechtler, Thomas ; Roth, Nina ; Mothes, Robert...
ECS Transactions.  25 (2009)  4 - p. 277-287 , 2009
Link: https://doi.org/10.1149/..
 
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12

New precursors for CVD copper metallization:

Norman, John A.T. ; Perez, Melanie ; Schulz, Stefan E..
Microelectronic Engineering.  85 (2008)  10 - p. 2159-2163 , 2008
Link: https://doi.org/10.1016/..
 
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13

Phosphane copper(I) complexes as CVD precursors:

Roth, Nina ; Jakob, Alexander ; Waechtler, Thomas...
Surface and Coatings Technology.  201 (2007)  22-23 - p. 9089-9094 , 2007
Link: https://doi.org/10.1016/..
 
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14

In-situ XPS Investigation of ALD Cu2O and Cu Thin Films aft..:

Dhakal, Dileep ; Waechtler, Thomas ; E. Schulz, Stefan...
urn:nbn:de:bsz:ch1-qucosa-147043.  , 2014
Link: https://nbn-resolving.or..
 
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15

Surface chemistry of a Cu(I) beta-diketonate precursor and ..:

Dhakal, Dileep ; Waechtler, Thomas ; E. Schulz, Stefan...
10.1116/1.4878815.  , 2014
Link: https://nbn-resolving.or..
 
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