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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
1
AlN Self-Rolled-Up Microtube Resonators with Multimode Reso..:
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
2
S-Rum Inductors: 30-Fold Enhancement of Inductance by Contr..:
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
5