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EPM 87. Energy Pulse and Particle Beam Modification of Mate..
International Conference held September 7—11, 1987 Dresden,...
Physical Research ; 8
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EPM '89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR ,
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EPITAXIAL LATERAL OVERGROWTH OF AMORPHOUS CVD SILICON FILMS..:
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EPM '89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR ,
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THE INVESTIGATION OF ION BEAM SYNTHESISED SILICON OXYNITRID..:
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EPM '89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR ,
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In situ RECRYSTALLIZATION OF IMPLANTED Si IN A HIGH-VOLTAGE..:
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EPM 87. Energy Pulse and Particle Beam Modification of Materials ,
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FORMATION OF BURIED SILICON NITRIDE AND OXYNITRIDE LAYERS I..:
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EPM 87. Energy Pulse and Particle Beam Modification of Materials ,
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STUDY OF ELECTRICAL AND OPTICAL PROPERTIES OF FUSED QUARTZ ..:
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EPM 87. Energy Pulse and Particle Beam Modification of Materials ,
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