Xu, Tian-li
118741  Ergebnisse:
Personensuche X
?
1

Robust adaptive regulation of magnetic levitation systems w..:

Sun, Zong-Yao ; Xu, Tian-Li ; Cai, Bin.
Journal of the Franklin Institute.  360 (2023)  3 - p. 1672-1689 , 2023
 
?
 
?
 
?
4

Study of Tungsten-Doped Carbon Hard Mask Etch Process Using..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Xu, Li-Tian ; Zeng, Li ; Zhu, Meng-Jiao... - p. 1-3 , 2024
 
?
5

Line Edge Roughness Reduction in High Aspect Ratio Carbon H..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Zeng, Li ; Xu, Li-Tian ; Zhu, Mengjiao - p. 1-3 , 2024
 
?
6

High Aspect Ratio Carbon Hard Mask Etch Process for Profile..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Zhu, Meng-Jiao ; Xu, Li-Tian ; Zeng, Li.. - p. 1-3 , 2024
 
?
7

Study of Photo-Resist (PR) Strip Rate with High Temperature..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Tian, Cheng ; Xu, Li-Tian ; Hu, Li-Song. - p. 1-3 , 2023
 
?
8

Trimming of Silicon Nitride Hard Mask Using Cyclic Depositi..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Xu, Li-Tian ; Mei, Pei ; Yao, Xing-Jun... - p. 1-2 , 2023
 
?
9

Investigation of High Aspect Ratio Amorphous Carbon Etching..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Zeng, Li ; Yang, Guang ; Jiang, Zhongwei.. - p. 1-3 , 2023
 
?
10

Deep trench (DT) etching process for power MOS device:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Chen, Chen ; Xu, Li-Tian ; Yao, Xing-Jun - p. 1-2 , 2023
 
?
11

Self-Limited Etching of Silicon Nitride Using Cyclic Proces..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Wang, Xue-Hua ; Xu, Li-Tian ; Cheng, Tian - p. 1-2 , 2023
 
?
12

SNC SADP Spacer etch process development using carbon hard ..:

, In: 2022 China Semiconductor Technology International Conference (CSTIC),
Liu, Hao ; Zhang, Jian-kun ; Zhao, Zun-hua... - p. 1-3 , 2022
 
1-15