Personensuche
X
?
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
1
Defect Reduction And Line Width Roughness (LWR) improvement..:
, In:
?
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
2
Elimination of Bond Pad Etch Induced Wafer Arcing via Reduc..:
, In:
?
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
3
In-Situ Post Etch Fluorocarbon Byproduct Removal for HDP Vo..:
, In:
?
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
4
Cloud Big Data Lake for Advanced Analytics in Semiconductor..:
, In:
?
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
5
Process Margin Improvement and Cost Saving from a New Plasm..:
, In:
?
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
6
Elimination of Pinhole Defects in Self-Aligned Double Patte..:
, In:
?
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
7
A Role of N2 and O2 Gasses in Post Etch Treatment (PET) for..:
, In:
?
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
8
A Novel Continuous Plasma Etch with Optimized Algorithms fo..:
, In:
?
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
9
Control Gate Device Leakage Reduction by Improving Polysili..:
, In:
?
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
10