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10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ,
2
A parametric study of ICP-RIE etching on a lithium niobate ..:
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2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics ,
6
Self-alignment Micro-lens by Gradient of Surface Tension:
, In:
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10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ,
8