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Yukawa, Hiroto
9  Ergebnisse:
Personensuche X
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1

Reactivity of Halogenated Resist Polymer with Low-Energy El..:

Yamamoto, Hiroki ; Kozawa, Takahiro ; Saeki, Akinori...
Japanese Journal of Applied Physics.  48 (2009)  6S - p. 06FC09 , 2009
Link: https://doi.org/10.1143/..
 
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2

X-ray Reflectivity Study on Depth Profile of Acid Generator..:

Fukuyama, Takehiro ; Kozawa, Takahiro ; Tagawa, Seiichi...
Applied Physics Express.  1 (2008)  - p. 065004 , 2008
Link: https://doi.org/10.1143/..
 
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3

Enhancement of Acid Production in Chemically Amplified Resi..:

Yamamoto, Hiroki ; Kozawa, Takahiro ; Tagawa, Seiichi...
Applied Physics Express.  1 (2008)  - p. 047001 , 2008
Link: https://doi.org/10.1143/..
 
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4

LER evaluation of molecular resist for EUV lithography:

Shiono, Daiju ; Hada, Hideo ; Yukawa, Hiroto...
Microelectronic Engineering.  84 (2007)  5-8 - p. 1084-1087 , 2007
Link: https://doi.org/10.1016/..
 
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5

Double patterning in nanoimprint lithography:

Okada, Makoto ; Miyake, Hiroto ; Iyoshi, Shuso...
Microelectronic Engineering.  112 (2013)  - p. 139-142 , 2013
Link: https://doi.org/10.1016/..
 
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6

Parameter identification of nonlinear viscoelastic model wi..:

Yukawa, Harutoshi ; Murai, Tatsuya ; Nishimura, Hiroto..
Procedia Engineering.  13 (2011)  - p. 395-401 , 2011
Link: https://doi.org/10.1016/..
 
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7

Metal Liftoff Process using Solvent Soluble Resist by UV-NI:

Nishino, Tomoki ; Fujii, Noriyoshi ; Miyake, Hiroto...
Journal of Photopolymer Science and Technology.  23 (2010)  1 - p. 87-90 , 2010
Link: https://doi.org/10.2494/..
 
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8

Preparation of platinum(IV) complexes with dipeptide and di..:

Watabe, Masatoshi ; Fukuda, Hiroto ; Kitsukawa, Koichiro...
Journal of Inorganic Biochemistry.  100 (2006)  10 - p. 1653-1659 , 2006
Link: https://doi.org/10.1016/..
 
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9

The association between hepatitis virus (HCV and TTV) infec..:

Tanaka, Hiroto ; Ueda, H. ; Miyano, M..
Gastroenterology.  118 (2000)  4 - p. A1493 , 2000
Link: https://doi.org/10.1016/..
 
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