van Dal, Mark
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Status and Performance of Integration Modules Toward Scaled..:

, In: 2023 International Electron Devices Meeting (IEDM),
 
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4

E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and pr..:

Napolitani, Enrico ; Duffy, Ray ; Zographos, Nikolas.
Materials Science in Semiconductor Processing.  42 (2016)  - p. 165 , 2016
 
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Ni fully silicided gates for 45nm CMOS applications:

Kittl, Jorge A. ; Lauwers, Anne ; Pawlak, Malgorzata A....
Microelectronic Engineering.  82 (2005)  3-4 - p. 441-448 , 2005
 
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Ni based silicides for 45nm CMOS and beyond:

Lauwers, Anne ; Kittl, Jorge A. ; Van Dal, Mark J.H....
Materials Science and Engineering: B.  114-115 (2004)  - p. 29-41 , 2004
 
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