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1
Development of a silicon MEMS transducer for microloudspeak..
Berichte aus der Halbleitertechnik
Exemplare: Zentrale;
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2
Low-stress LPCVD silicon nitride membranes and applications..
Mikrosystemtechnik
Exemplare: Zentrale;
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3
Micromachining of monocrystalline silicon membranes for sen..:
Exemplar:
Zentrale:Magazin 01.T.8983