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2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
1
The Constraint Artificial-Intelligence Assisted Method for ..:
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2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
2
A Case of Plasma-Induced Film Breakdown in 3D NAND BEOL Die..:
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2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
3
Improvement of Twisting and Line-Edge Roughness of 3D NAND ..:
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2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
4
Study of Plasma Ash Rate Enhancement by Machine Learning Mo..:
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2023 International Electron Devices Meeting (IEDM) ,
14