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Dai, Gaoliang
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1

A new magnetic enhanced chemical mechanical polishing metho..:

Guo, Jiang ; Qin, Pu ; Li, Qikai...
Journal of Materials Processing Technology.  327 (2024)  - p. 118361 , 2024
Link: https://doi.org/10.1016/..
 
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2

A New Kind of Atomic Force Microscopy Scan Control Enabled ..:

Degenhardt, Johannes ; Bounaim, Mohammed Wassim ; Deng, Nan..
Nanomanufacturing and Metrology.  7 (2024)  1 - p. , 2024
Link: https://doi.org/10.1007/..
 
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3

Systematische Simulationsmethode zur effizienten Abschätzun..:

Degenhardt, Johannes ; Tutsch, Rainer ; Dai, Gaoliang
tm - Technisches Messen.  90 (2023)  s1 - p. 27-32 , 2023
Link: https://doi.org/10.1515/..
 
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4

Correction: Comparison of EUV Photomask Metrology Between C..:

Dai, Gaoliang ; Hahm, Kai ; Sebastian, Lipfert.
Nanomanufacturing and Metrology.  5 (2022)  4 - p. 440-440 , 2022
Link: https://doi.org/10.1007/..
 
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5

Comparison of EUV Photomask Metrology Between CD-AFM and TE:

Dai, Gaoliang ; Hahm, Kai ; Sebastian, Lipfert.
Nanomanufacturing and Metrology.  5 (2022)  2 - p. 91-100 , 2022
Link: https://doi.org/10.1007/..
 
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6

Quantitative Element‐Sensitive Analysis of Individual Nanoo..:

Wählisch, André ; Unterumsberger, Rainer ; Hönicke, Philipp...
Small.  19 (2022)  9 - p. , 2022
Link: https://doi.org/10.1002/..
 
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7

Foreword to the Special Issue on Atomic and Close-to-Atomic..:

Dai, Gaoliang ; Park, Daesung ; Orji, Ndubuisi George
Nanomanufacturing and Metrology.  5 (2022)  2 - p. 81-82 , 2022
Link: https://doi.org/10.1007/..
 
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8

Correction of Interferometric High-Order Nonlinearity Error..:

Dai, Gaoliang ; Hu, Xiukun
Nanomanufacturing and Metrology.  5 (2022)  4 - p. 412-422 , 2022
Link: https://doi.org/10.1007/..
 
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9

Analysis of Line-Edge Roughness Using EUV Scatterometry:

Fernández Herrero, Analía ; Scholze, Frank ; Dai, Gaoliang.
Nanomanufacturing and Metrology.  5 (2022)  2 - p. 149-158 , 2022
Link: https://doi.org/10.1007/..
 
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10

True 3D Nanometrology: 3D-Probing with a Cantilever-Based S..:

Thiesler, Jan ; Ahbe, Thomas ; Tutsch, Rainer.
Sensors.  22 (2021)  1 - p. 314 , 2021
Link: https://doi.org/10.3390/..
 
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11

A new type of nanoscale reference grating manufactured by c..:

Deng, Xiao ; Dai, Gaoliang ; Liu, Jie...
Ultramicroscopy.  226 (2021)  - p. 113293 , 2021
Link: https://doi.org/10.1016/..
 
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12

Round robin comparison on quantitative nanometer scale magn..:

Hu, Xiukun ; Dai, Gaoliang ; Sievers, Sibylle...
Journal of Magnetism and Magnetic Materials.  511 (2020)  - p. 166947 , 2020
Link: https://doi.org/10.1016/..
 
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13

Tip wear and tip breakage in high-speed atomic force micros..:

Strahlendorff, Timo ; Dai, Gaoliang ; Bergmann, Detlef.
Ultramicroscopy.  201 (2019)  - p. 28-37 , 2019
Link: https://doi.org/10.1016/..
 
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14

Spatial dimensions in atomic force microscopy: Instruments,..:

Dixson, Ronald ; Orji, Ndubuisi ; Misumi, Ichiko.
Ultramicroscopy.  194 (2018)  - p. 199-214 , 2018
Link: https://doi.org/10.1016/..
 
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15

Metrological large range magnetic force microscopy:

Dai, Gaoliang ; Hu, Xiukun ; Sievers, Sibylle...
Review of Scientific Instruments.  89 (2018)  9 - p. , 2018
Link: https://doi.org/10.1063/..
 
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