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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
4
A Diaphragm Triaxial Force Sensor Using Soi Technology With..:
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
9
Dual-Detections of Tactile Force and Proximity with an Ultr..:
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
14