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Takai, O.
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Proceedings fo the 19th Symposium on Plasma Science for Mat.. 

Thin solid films ; 516.2008,13
Takai, O. , 2008
Copies:  Zentrale:Magazinturm-E02 15z phy 957 jb/588-516,5
 
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2

Proceedings of Symposium Q on Thin Films, IUMRS-ICA-97 

Makuhari, Chiba, Japan, 16 - 18 September 1997  Thin solid films ; 334,1/2
Takai, O. , 1998
Copies:  Zentrale:Magazinturm-E02 15z phy 957 jb/588-334:335
 
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