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1
Photonic MEMS devices
design, fabrication and control
Optical science and engineering ; 136
Copies:
Zentrale: a elt 721 m/142
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2
Selected papers from the 9th International Conference on Ma..
ICMAT 2005 ; Singapore, 3 - 8 July 2005
Sensors and actuators, A, Physical ; 133.2007,2
Copies:
Zentrale:Magazinturm-E02 15z elt 610 j/118-133.134
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4
RF MEMS Switches and Integrated Switching Circuits
Design, Fabrication and Test
MEMS reference shelf
Copies:
Zentrale: a elt 716 e/446
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