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International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
1
A hierarchical model for characterising spatial wafer varia..:
, In:Copies: Zentrale;
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International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
2
A run-to-run controller for product surface quality improve..:
, In:Copies: Zentrale;
1-2