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Alessandri, Anna
2
results:
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?
1
Andromeda: A Flexible MEMS Technology Platform for a Variet..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Martini, Irene
;
Alessandri, Anna
;
Carminati, Marta
... - p. 716-719 , 2023
Link:
https://doi.org/10.1109/..
?
2
Deep Silicon Etch:
, In:
Silicon Sensors and Actuators
,
Alessandri, Anna
;
D'Ercoli, Filippo
;
Petruzza, Pietro
. - p. 133-167 , 2022
Link:
https://doi.org/10.1007/..
1-2
