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Borrel, Julien
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Pre-Amorphization Implants and in-situ Surface Preparation ..:

, In: 2019 19th International Workshop on Junction Technology (IWJT),
Borrel, Julien ; Gregoire, Magali ; Ghegin, Elodie... - p. 1-4 , 2019
Link: https://doi.org/10.23919..
 
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Effects of Pre-amorphization Thickness and Carbon Implantat..:

, In: 2018 22nd International Conference on Ion Implantation Technology (IIT),
Lachal, Laurent ; Nemouchi, Fabrice ; Mazen, Frederic... - p. 54-57 , 2018
Link: https://doi.org/10.1109/..
 
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