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CANDLER, PAUL D.
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1

List of Contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Amiotti, Marco... - p. xi-xiii , 2010
Link: https://doi.org/10.1016/..
 
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2

Encapsulation by film deposition:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Candler, Rob N. ; Hagelin, Paul ; Cameron, Christopher - p. 669-676 , 2020
Link: https://doi.org/10.1016/..
 
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3

List of contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Albert, Stephan Gerhard... - p. xv-xvii , 2020
Link: https://doi.org/10.1016/..
 
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4

Encapsulation by Film Deposition:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Candler, Rob N. ; Hagelin, Paul M. - p. 664-670 , 2015
Link: https://doi.org/10.1016/..
 
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5

List of Contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Amiotti, Marco... - p. xiii-xv , 2015
Link: https://doi.org/10.1016/..
 
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