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Canals, Francesc
1
results:
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1
Suspended Nanochannel Resonators Made by Nanoimprint and Ga..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Muller, Manuel
;
Teuber, Jeremy
;
Nasri, Rukan
... - p. 1041-1044 , 2023
Link:
https://doi.org/10.1109/..
1-1
