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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
1
Characterization of ALD Low-K Films:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
2
The Study of Silicon Nitride Films Deposited In Batch ALD S..:
, In:
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Lecture Notes in Computer Science; Computer Vision – ECCV 2022 Workshops ,
3