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Fuh, Yiin-Kuen
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1

A Machine Learning Study to Obtain an Optimal Processing Pu..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Tseng, Xue-Li ; Chen, Yu-Shin ; Chen, Hsuan-Fan... - p. 1-5 , 2024
Link: https://doi.org/10.1109/..
 
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2

Pulsed DC Parameters (Reverse Voltage, Duty Cycle, Pulsed F..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Zhou, Wei-Yu ; Tseng, Xue-Li ; Yuan, Ning-Hsiu... - p. 1-6 , 2023
Link: https://doi.org/10.1109/..
 
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3

Minimizing residual stress of aluminum nitride (AlN) thin f..:

, In: 2022 China Semiconductor Technology International Conference (CSTIC),
Chen, Wei-Lun ; Yang, Shang Shian ; Yuan, Ning Hsiu... - p. 1-4 , 2022
Link: https://doi.org/10.1109/..
 
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4

Optimization on Deposition of Aluminum Nitride by Pulsed Di..:

, In: 2020 China Semiconductor Technology International Conference (CSTIC),
Yang, Yu-Pu ; Lu, Te-Yun ; Wang, Song-Ho... - p. 1-3 , 2020
Link: https://doi.org/10.1109/..
 
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